RS-3021CJ
Application:Huettinger 20KW RF Generator
System:ADP Dry Etcher, FPD 7th Generation Equipment. IPS Dry Etcher, FPD 7th Generation Equipment.
System:ADP Dry Etcher, FPD 7th Generation Equipment. IPS Dry Etcher, FPD 7th Generation Equipment.
RS-3041CJ
Application:Huettinger 30KW RF Generator
System:Jusung Enginneering CVD, ADP Dry Etcher, FPD 7th Generation Equipment. IPS Dry Etcher, SFA CVD, FPD 7th Generation Equipment
System:Jusung Enginneering CVD, ADP Dry Etcher, FPD 7th Generation Equipment. IPS Dry Etcher, SFA CVD, FPD 7th Generation Equipment
3W30KH-DR
Application: AE Generator
System:ICD Dry Etcher and LIG ADP Dry Etcher, FPD 8th Generation System
System:ICD Dry Etcher and LIG ADP Dry Etcher, FPD 8th Generation System
